Metal bumps for cooling device connection

ABSTRACT

The mechanisms for forming metal bumps to connect to a cooling device (or a heat sink) described herein enable substrates with devices to dissipate heat generated more efficiently. In addition, the metal bumps allow customization of bump designs to meet the needs of different chips. Further, the usage of metal bumps between the semiconductor chip and cooling device enables advanced cooling by passing a cooling fluid between the bumps.

FIELD

This disclosure relates to the fabrication of integrated circuitdevices, and more particularly, to the fabrication of bump structures inintegrated circuit devices.

BACKGROUND

As integrated circuit (IC) wafer fabrication process technology advancesfrom sub-micron to nanometers, the heat generated by ICs increasesgreatly due to the increased number of devices, such as transistors, aswell as an increase in the device current leakage. Therefore, thepackage and system thermal performance becomes a concern for highperformance integrated circuits (or integrated circuit devices, orchips).

Heat sinks (cooling devices) are sometimes used to dissipate heatgenerated by the devices. Most heat sinks are made of materials withhigh coefficients of thermal conductivity. Most heat sinks for suchapplications have pins, fins, and/or ridges, which are used to increasetheir surface areas. The large surface areas of heat sinks allow suchsurfaces to come in contact with the surrounding air and enable the heatgenerated by the high performance integrated devices (or circuits) to bedissipated more quickly.

The existing mechanisms of integrating packaged chips with heat sinkshave their limits in heat dissipation. There is a need for newmechanisms for heat dissipation.

BRIEF DESCRIPTION OF THE DRAWINGS

The present disclosure will be readily understood by the followingdetailed description in conjunction with the accompanying drawings, andlike reference numerals designate like structural elements.

FIG. 1 shows a schematic side view of a flip-chip ball-grid-array (BGA)package for an integrated circuit (IC), in accordance with someembodiments.

FIG. 2A shows a schematic side view of a flip-chip ball-grid-array (BGA)package for an integrated circuit (IC), in accordance with someembodiments.

FIG. 2B shows a schematic top view of IC, in accordance with someembodiments.

FIG. 2C shows a schematic side view of a flip-chip ball-grid-array (BGA)package for the integrated circuit (IC), in accordance with someembodiments.

FIG. 2D shows two high generation regions on an IC, in accordance withsome other embodiments.

FIG. 2E shows a schematic side view of a flip-chip ball-grid-array (BGA)package for an integrated circuit (IC), in accordance with someembodiments.

FIG. 2F shows a schematic side view of a flip-chip ball-grid-array (BGA)package for a three-dimensional (3D) IC (3DIC), in accordance with someembodiments.

FIG. 3A shows a bump structure on a wafer, in accordance with someembodiments.

FIG. 3B shows a copper post structure on a wafer, in accordance withsome embodiments.

FIGS. 4A-4L show cross-sectional views of a region of a substrate withintegrated circuits (ICs) in a sequential process flow to prepare bumpsfor connecting with a heat sink, in accordance with some embodiments.

FIG. 5 shows a substrate being positioned between a heat sink and apackage substrate, in accordance with some embodiments.

DETAILED DESCRIPTION OF THE EXEMPLARY EMBODIMENTS

It is to be understood that the following disclosure provides manydifferent embodiments, or examples, for implementing different featuresof the embodiments. Specific examples of components and arrangements aredescribed below to simplify the present disclosure. These are, ofcourse, merely examples and are not intended to be limiting. Inaddition, the present disclosure may repeat reference numerals and/orletters in the various examples. This repetition is for the purpose ofsimplicity and clarity and does not in itself dictate a relationshipbetween the various embodiments and/or configurations discussed.

FIG. 1 shows a schematic side view of a flip-chip ball-grid-array (BGA)package 100 for an integrated circuit (IC) 106, in accordance with someembodiments. The package includes a package substrate 101, balls 102,and bumps 103 on packages substrate 101, which are connected to bumps104 on IC 106. Package 100 also has a heat sink 107 made of a materialwith a high coefficient of thermal conductivity. The heat sink 107 ismade of one or more materials with high thermal conductivity, such asmetal(s). The heat sink 107 includes a number ofheat-dissipation-assisting structures, such as fins, pins, or ridges,109, in accordance with some embodiments. The heat sink 107 shown inFIG. 1 is merely an example. Other configurations are also possible. Forexample, the heat sink 107 may include a fan (not shown) to assistcooling. The heat generated by IC 106 is transferred to the heat sink107 by conduction. There is a thermal conductive layer 105 between theheat sink 107 and the IC 106 to ensure good contact between the surfacesof heat sink 107 and IC 106. The thermal conductive layer 105 is oftenmade of thermal grease, such as G-751, X23-7762, X23-7783D, etc. Withoutthe thermal conductive layer 105, the effective contact areas betweenthe heat sink 107 and the IC 106 would be greatly reduced, which resultin inefficient heat dissipation and higher temperature and a higherfailure rate of IC 106.

The thermal conductivity of thermal grease, such as about 4.5 W/m° K forG-751, is higher than other typical oils, such as about 0.15 W/m° K formachine lubricating oil, or a liquid paste, such as about 0.35 W/m° Kfor epoxy. Metals, on the other hand, have much higher thermalconductivities. For example, the thermal conductivity of SnPb (63%/37%)solder is about 50 W/m° K. The thermal conductivity of copper is evenhigher at about 401 W/m° K. If metal is used to provide thermalconductive paths between the heat sink 107 and IC 106, the heatdissipation of IC 106 through heat sink 107 could be more efficient thanthermal grease. However, it is not easy to use metal(s) as a thermalconductive layer 105, because the thermal conductive layer 105 needs tospread across the entire surface and adhere well with both the surface108 of heat sink 107 and back surface 110 of IC 106. One would suggestusing solder paste as the thermal conductive layer 105. However, a flux(a liquid) is often applied on the surface of metal and solder toprevent oxidation of solder during solder reflow. It's difficult for theflux to be removed from between two flat surfaces. Therefore, this isnot an ideal option.

FIG. 2A shows a schematic side view of a flip-chip ball-grid-array (BGA)package 200 for an integrated circuit (IC) 106, in accordance with someembodiments. Many components and configurations of package 200 aresimilar to those in package 100 of FIG. 1. However, the heat sink 107and IC 106 of FIG. 2A are coupled or connected to each other via anumber of bumps 213 on IC 106 and bumps 214 on heat sink 107, instead ofthe thermal conductive layer 105 of FIG. 1. In some embodiments, bumps213 on IC 106 are soldered directly onto the back surface of heat sink107 without bumps 214. However, the presence of bumps 214 on heat sink107 has the benefits of better surface wetting during solder reflow andbetter alignment between IC 106 and heat sink 107. The interfacialboundaries between bumps 213 and 214 are not clear, because the bumpsare reflowed (or heated) to make ensure that portions bumps 213 and 214are melted together to ensure good contact. The bumps 213 and 214 couldbe solder bumps or copper posts, which are made of metals, which havemuch higher thermal conductivities than thermal grease used for thethermal conductive layer, as discussed above. By using bumps to makecontacts between IC 106 and heat sink 107, the amount of heat dissipatedand efficiency of heat dissipation could be increased. Flux can escape(or leave) the surfaces it comes in contact via the space between thebumps.

In addition to the benefits mentioned above, there are also otherbenefits of using bumps to make contacts with heat sink(s). FIG. 2Bshows a schematic top view of IC 106, in accordance with someembodiments. There are numerous devices on IC 106. FIG. 2B shows aregion 220 (region H) on IC 106, which generates more heat than otherregions of IC 106, in accordance with some embodiments. A higher numberof bumps can be placed on region 220 to make contacts with heat sink 107to enable the larger amount of heat generated in region 220 to bedissipated by heat sink 107 and to better balance the thermal stresscaused by the larger amount of heat generated. Stress and thermalsimulation can be used to determine the placement and number of bumps onIC 106 to optimize both the heat dissipation and stress balance.

FIG. 2C shows a schematic side view of a flip-chip ball-grid-array (BGA)package 230 for the integrated circuit (IC) 106, in accordance with someembodiments. The package 230 has a higher number of bumps 213 and 214,such as 213 _(A), 213 _(B), 213, 214 _(A), 214 _(B), and 214 _(C), nearthe center of IC 106 and heat sink 107 to assist heat dissipation. Usingbumps for thermal contacts enables customized design for thermalcontacts between IC chip 106 and heat sink 107. Different bump designsfor different products with different heat generation patterns on theICs can be used to provide an optimum (or best) heat dissipationmechanism. The pattern of high center heat generation is only anexample, and other embodiments are also possible. The locations andnumber (or layout) of metal bumps 213 on IC 106 (and correlating metalbumps 214 on heat sink 107) depend on the heat generation pattern on IC106, in accordance with some embodiment. The layout can be metal bumps213 can be customized according to different designs of IC 106.

FIG. 2D shows two high generation regions 221 and 222 on IC 106, inaccordance with some other embodiments. A different bump design (orlayout) for IC 106 and heat sink 107 for this different heat generationpattern could be used to best address the need of the IC. The discussionabove mainly focuses on the design of corresponding bumps on IC 106 andheat sink 107. The design and/or configuration of the heat sink 107 mayalso be optimized to meet the need of the specific IC 106.

In addition to the benefit of optimized heat dissipation by customizingbump designs, there are other possible benefits. FIG. 2E shows aschematic side view of a flip-chip ball-grid-array (BGA) package 250 foran integrated circuit (IC) 106, in accordance with some embodiments.FIG. 2E shows that the space between the heat sink 107 and IC 106 isenclosed by a casing 251. A fluid inlet 252 and a fluid outlet 253 areattached to the casing 251. A cooling fluid, which can be a liquid or agas, can be flown from the inlet 252 through the channels, such aschannels A, B, C and D, between the heat sink 107, the IC 106, and bumps103 and 104. With the usage of the cooling fluid (or coolant), the heatdissipation can be further improved.

The mechanisms described above may also apply to any type of ICs,including three-dimensional ICs (3DICs). FIG. 2F shows a schematic sideview of a flip-chip ball-grid-array (BGA) package 270 for a 3DIC 206, inaccordance with some embodiments. The 3DIC 206 includes Two ICs 206 _(A)and 206 _(B). In some embodiments, the 3DIC 206 has through silicon vias(TSVs) 217, 218 in ICs 206 _(A) and 206 _(B), respectively, inaccordance with some embodiments. FIG. 2F shows that the bumps 213 areformed on TSVs, because TSVs can also help heat dissipation. However,the bumps that are connected to heat sink 107 may also be placed onmetal surfaces that are not directly over or connected to TSVs.Alternatively, the 3DIC 206 may not include TSVs.

Structurally, a bump actually contains the bump itself and a so-calledunder bump metallurgy (UBM) layer located between the bump and aninput/output (I/O) pad. FIG. 3A shows a bump structure on a wafer 302with a substrate 310, in accordance with some embodiments. Substrate 310may be a semiconductor substrate, such as a bulk silicon substrate,although it may include other semiconductor materials, such as groupIII, group IV, and/or group V elements. Semiconductor devices 314, suchas transistors, may be formed at the surface of substrate 310.Interconnect structure 312, which includes metal lines and vias (notshown) formed therein and connected to semiconductor devices 314, isformed over substrate 310. The metal lines and vias may be formed ofcopper or copper alloys, and may be formed using the well-knowndamascene processes. Interconnect structure 12 may include commonlyknown inter-layer dielectrics (ILDs) and inter-metal dielectrics (IMDs).

Metal pad 328 is formed over interconnect structure 312. Metal pad 328may comprise aluminum, and hence may also be referred to as aluminum pad328. Although it may also be formed of, or include, other materials,such as copper, silver, gold, nickel, tungsten, alloys thereof, and/ormulti-layers thereof. Metal pad 328 may be electrically connected tosemiconductor devices 314, for example, through underlyinginterconnection structure 312. In some embodiments, a passivation layer330 is formed to cover edge portions of metal pad 328. The passivationlayer 330 may be formed of polyimide or other known dielectricmaterials. Additional passivation layers may be formed over interconnectstructure 312 and at the same level, or over, metal pad 328. Theadditional passivation layers may be formed of materials such as siliconoxide, silicon nitride, un-doped silicate glass (USG), polyimide, and/ormulti-layers thereof.

An opening is formed in passivation layer 330, with metal pad 328exposed. A diffusion barrier layer 340 and a thin seed layer 342 areformed to cover the opening with the diffusion barrier layer 340 incontact with the metal pad 328. Diffusion barrier layer 340 may be atitanium layer, a titanium nitride layer, a tantalum layer, or atantalum nitride layer. The materials of seed layer 342 may includecopper or copper alloys, and hence is referred to as copper seed layer342 hereinafter. However, other metals, such as silver, gold, aluminum,and combinations thereof, may also be included. In some embodiments,diffusion barrier layer 340 and copper seed layer 342 are formed usingsputtering.

After the barrier layer 340 and copper seed layer 342 are formed, a maskis formed over the copper seed layer 342 to allow a copper layer 350 tobe plated on the exposed surface of copper seed layer 342, in accordancewith some embodiments. A metal layer 352 may be optionally formed on thecopper layer 350. In some embodiments, metal layer 352 is anickel-containing layer comprising, for example, a nickel layer or anickel alloy layer deposited by plating. Next, solder layer 360 isformed on nickel layer 352, for example, by plating. Solder layer 360may be a lead-free pre-solder layer formed of, for example, SnAg, or asolder material, including alloys of tin, lead, silver, copper, nickel,bismuth, or combinations thereof. During the formation of the mask, theresidue may remain on the copper seed layer 342. The residue needs to beremoved. The process is called “descum,” which may result in oxidationof the copper seed layer 342. Oxidized surface of the copper seed layer342 may affect the copper plating process. A reduction process may beinvolved to reduce the oxidized surface to copper.

Afterwards, the mask is removed. As a result, portions of copper seedlayer 342 underlying the mask are exposed. The exposed portions ofcopper seed layer 342 are then removed by a flash etching. Next, theexposed portions of diffusion barrier layer 340 are also removed. Asolder reflowing process is then performed to form solder layer 360 as asolder bump 360 a, as shown in FIG. 3A.

In alternative embodiments, as shown in FIG. 3B, the thickness of copperlayer 350 is increased so that copper layer 350 becomes a copper post(or pillar). In some embodiments, after the optional formation of metallayer 352 on copper post 350 and before the removal of the mask, solderlayer 362, which may be a thin solder layer, may be plated on metallayer 352. As mentioned above, a bump actually contains the bump itselfand a so-called under bump metallurgy (UBM) layer located between thebump and an input/output (I/O) pad. The diffusion barrier layer 340, thecopper seed layer 342, the copper layer 350 and the copper layer of FIG.3A can be combined together and be called a UBM layer. Similarly, thediffusion barrier layer 340 and the copper seed layer 342 of FIG. 3B canbe combined together and be called a UBM layer.

The embodiments shown in FIGS. 3A and 3B are only two examples; otherembodiments of bumps are also possible. Further details of bumpformation process may be found in U.S. patent application Ser. No.12/842,617, filed on Jul. 23, 2010 and entitled “Preventing UBMOxidation in Bump Formation Processes,” and U.S. patent application Ser.No. 12/846,353, filed on Jul. 29, 2010 and entitled “Mechanisms forForming Copper Pillar Bumps,” both of which are hereby incorporated byreference in their entireties.

FIGS. 4A-4L show cross-sectional views of a region 400 of a substrate450 with integrated circuits (ICs) in a sequential process flow toprepare bumps for connecting with a heat sink, in accordance with someembodiments. Devices (not shown) and interconnect (also not shown) areformed in substrate 450. Other structures, such as through silicon vias(TSVs) may also be formed on substrate 450 and are not shown here. FIG.4A shows metal pads 401 are formed on substrate 450. The metal pads 401could be above the surface of substrate 450 or be part of substrate 450(i.e. in substrate 450). A passivation layer 402 is formed to cover thesubstrate 450 with portions of metal pads 401 exposed. A protective film405 is deposited over substrate 450 to protect the front side ofsubstrate 450. Protective film 405 protects the front side surface ofsubstrate 450 during subsequent processing. Any film that can be placedon substrate 450 to protect the front side surface may be used. In someembodiments, protective film 405 is made of conventional photoresist,which is in liquid form and is deposited by a spin-on process. In someother embodiments, the material of protective film 405 is a dry filmresist (DFR).

After protective film 405 is deposited, the backside of substrate 450 isdeposited with a UBM layer 406. Exemplary sub-layers of an UBM layer hasbeen discussed above. After the UBM layer 406 is deposited on thebackside of substrate 450, the backside of substrate 450 is patternedwith a patterning layer 407, as shown in FIG. 4C in accordance with someembodiments. The material used for the patterning layer 407 could be aconventional photoresist, which is in liquid form and is deposited by aspin-on process, in accordance with some embodiments. In anotherembodiment, the material of protective film 405 is a dry film resist(DFR), which can also be patterned by photolithography (i.e. with lightexposure). The DFR can be a positive or a negative photoresist. DFR hasbeen used for creating patterns for copper plating for circuit boards.An example of DFR is MP112, made by TOK CO. LTD. of Japan. After thepatterning layer 407 is deposited, layer 407 is patterned by lithographyand etching to create openings 408, which will be filled with bump metalat a later operation.

FIG. 4D shows a bump metal layer 409 used to fill the openings 408 ofFIG. 4C, in accordance with some embodiments. The bump metal 409 can bedeposited by physical vapor deposition (PVD, or sputtering), chemicalvapor deposition (CVD), or plating. The excess bump metal outside theopenings 408 is then removed by etching or by chemical-mechanicalpolishing (CMP). After the excess bump metal is removed, the backside ofsubstrate 450 is covered with a protective film 410, as shown in FIG.4E, in accordance with some embodiments. The protective film 410protects the back side surface of substrate 450 during subsequentprocessing. The function of protective film 410 is similar to protectivefilm 405; therefore, protective film 410 can be made of material(s)similar to protective film 405.

After the backside protective film 410 is deposited, the front sideprotective film 405 is removed and an UBM layer 411 is deposited tocover the front side surface of substrate 450, as shown in FIG. 4F inaccordance with some embodiments. The UBM layer 411 could include morethan one sub-layers, as described above in FIGS. 3A and 3B. After thedeposition of the UBM layer 411, the front side of substrate 450 ispatterned with a patterning layer 412, as shown in FIG. 4G in accordancewith some embodiments. Because the function of the patterning layer 412is similar to patterning layer 407, materials suitable for layer 407 arealso suitable for layer 412. After the patterning layer 412 isdeposited, layer 412 is patterned by lithography and etching to createopenings 413, which will be filled with bump metal at a later operation.

FIG. 4H shows that a bump metal layer 414 is used to fill the openings413 of FIG. 4G, in accordance with some embodiments. The materials forbump metal layer 414 and their deposition methods have been describedabove. In some embodiments, the bump metal layer 414 is plated onsubstrate 450. The excess bump metal outside the openings 413 is thenremoved by etching or by chemical-mechanical polishing (CMP). After theexcess bump metal is removed, the remaining patterning layer 412 isremoved, as shown in FIG. 4I in accordance with some embodiments. Afterthe removal of the remaining patterning layer 412, metal bumps 414′remain on the front side of substrate 450. The backside protective film410 is also removed to expose the back side metal bumps 409′, as shownin FIG. 4I in accordance with some embodiments.

After the remaining patterning layer 412 is removed and also thebackside protective film 410 is removed, the exposed UBM layers 406 and411 are removed, in accordance with some embodiments. FIGS. 4J and 4Kshow that the UBM layer 411 is removed first and UBM layer 406 isremoved afterwards, in accordance with some embodiments. However, theorder of UBM removal can be reversed, in some embodiments. After theexposed UBM layers are removed, the bump metal layers 409 and 414 arethen reflowed to form metal bumps 409′ and 414′, as shown in FIG. 4L, inaccordance with some embodiments. To reflow a substrate with both frontside and backside bumps, such as substrate 450, the edge of thesubstrate is held by a device and the hot inert gas, such as N₂, He, Ne,Ar, Kr, or Xe, are blown on the substrate surface or surfaces to heatthe substrate, in accordance with some embodiments. After reflow iscompleted, substrate 450 is ready to be packaged with other components,such as heat sink 107 and/or package substrate 101.

FIG. 5 shows substrate 450 positioned between a heat sink 107 and apackage substrate 101, in accordance with some embodiments. The heatsink 107 has a number of metal bumps 509′ (similar to bumps 214 of FIGS.2A and 2C) that are placed in positions that correlate to the positionsof the metal bumps 409′ (similar to bumps 213 of FIGS. 2A and 2C) ofsubstrate 450, which is the substrate IC 106 in FIG. 1. Similarly, thepackage substrate 101 also has a number of metal bumps 103 that areplaced in positions that correlate to the positions of the metal bumps414′ on substrate 450. In the embodiments shown in FIG. 5, there is aUBM layer 512 under the metal bumps 103. In addition, on the other sideof package substrate 101, there are a number of balls 102, which can besolder balls used to form connections with a board. Because the heatsink 107 is merely used as a heat dissipation device (or coolingdevice), a UBM layer is not formed between the metal bumps 509′ and theheat sink 107. However, a UBM layer may be formed between the metalbumps 509′ and the heat sink 107.

The cross-sectional views of a sequential process flow to prepare metalbumps on the front side and back side of substrate 450 shown in FIGS.4A-4L are merely exemplary. Other processing sequences are alsopossible. For example, in the processing sequence shown in FIGS. 4A-4L,the backside bumps are deposited first. Alternatively, the front sidebumps can be deposited first (or before the deposition of the backsidebumps). Further the UBM layers 406 and 411 can be formed duringoperations that are in different sequence from the ones shown in FIGS.4A-4L. According to embodiments, the UBM layer 411 for the front sidebumps 414′ is formed before the deposition of the metal bump layer 414.Similarly, the backside UBM layer 406 is formed before the deposition ofthe backside metal bump layer 409. In addition, the removal of theexcess UBM layers 406 and 411 can be performed any time after theindividual metal bump layers 409 and 414 are formed. Although BGApackaging is described above, using metal bumps to make connectionsbetween IC chip 106 and heat sink(s) 107 (or a cooling device) is notlimited to BGA packaging. IC 106 may be placed on other types ofpackages.

The mechanisms of forming metal bumps to connect to a cooling device (ora heat sink) described above enable substrates with devices to dissipateheat generated more efficiently. In addition, the metal bumps allowcustomization of bump designs to meet the needs of different chips.Further, the usage of metal bumps between the semiconductor chip andcooling device enables advanced cooling by passing a cooling fluidbetween the bumps.

In one embodiment, a packaged substrate with a heat sink is provided.The package substrate includes a packaging substrate, a heat sink, and asemiconductor substrate. The semiconductor substrate has a plurality offirst-side metal bumps on a first side of the substrate physicallyconnected to the packaging substrate. The semiconductor substrate has aplurality of second-side metal bumps on a second side of thesemiconductor substrate physically connected to the heat sink. The firstside and the second side of the semiconductor substrate are on oppositesides of the semiconductor substrate.

In another embodiment, a packaged three-dimensional integrated circuit(3DIC) with a heat sink is provided. The packaged 3DIC includes apackaging substrate, a heat sink, and a 3DIC. The 3DIC includes at leasttwo levels of integrated circuits (ICs), and the 3DIC has a plurality offirst-side metal bumps on a first side of the 3DIC physically connectedto the packaging substrate. The 3DIC has a plurality of second-sidemetal bumps on a second side of the 3DIC physically connected to theheat sink, and wherein the first side and the second side of the 3DICare on opposite sides of the substrate.

In yet another embodiment, a method of preparing a semiconductorsubstrate with metal bumps on both sides of the substrate is provided.The method includes depositing a first-side UBM layer on a first surfaceof the semiconductor substrate, and forming a plurality of first-sidemetal bumps on the first surface of the semiconductor substrate afterthe first-side UBM layer is deposited. The method also includes forminga second-side UBM layer on a second side of the semiconductor substrate,and the first surface and the second surface are opposite of each other.The method further includes forming a plurality of second-side metalbumps on the second surface of the semiconductor substrate after thesecond-side UBM layer is deposited. In addition, the method includesremoving exposed first-side UBM layer and exposed second-side UBM layerafter the plurality of first-side metal bumps and the plurality ofsecond-side metal bumps are formed. Additionally, the method includesreflowing the plurality of first-side metal bumps and the plurality ofsecond side metal bumps.

Various modifications, changes, and variations apparent to those ofskill in the art may be made in the arrangement, operation, and detailsof the methods and systems disclosed. Although the foregoing embodimentshave been described in some detail for purposes of clarity ofunderstanding, it will be apparent that certain changes andmodifications may be practiced within the scope of the appended claims.Accordingly, the present embodiments are to be considered asillustrative and not restrictive, and are not to be limited to thedetails given herein, but may be modified within the scope andequivalents of the embodiments described.

The invention claimed is:
 1. A packaged substrate with a heat sink,comprising: a packaging substrate; a heat sink; and a semiconductorsubstrate, wherein the semiconductor substrate has a plurality offirst-side metal bumps on a first side of the substrate physicallyconnected to the packaging substrate, and wherein the semiconductorsubstrate has a plurality of second-side metal bumps on a second side ofthe semiconductor substrate physically connected to the heat sink, andwherein the first side and the second side of the semiconductorsubstrate are on opposite sides of the semiconductor substrate, thesemiconductor substrate has a first region configured to generate ahigher amount of heat than a second region of the semiconductorsubstrate, and a number of second-side metal bumps of the plurality ofsecond-side metal bumps per unit area in the first region is greaterthan a number of second-side metal bumps of the plurality of second-sidemetal bumps per unit area in the second region.
 2. The packagedsubstrate of claim 1, wherein the semiconductor substrate is anintegrated circuit (IC).
 3. The packaged substrate of claim 1, whereinthe packaging substrate has a ball-grid-array (BGA) on one side and isphysically connected to the semiconductor substrate via metal bumps onthe opposite side from the BGA, wherein locations of the metal bumps onthe packaging substrate correlate to locations of the plurality offirst-side metal bumps on the semiconductor substrate.
 4. The packagedsubstrate of claim 1, wherein the heat sink has a plurality of pins,fins, or ridges.
 5. The packaged substrate of claim 4, wherein there aremetal bumps on the heat sink on an opposite side of the plurality ofpins, fins, or ridges, wherein locations of the metal bumps on the heatsink correlate to locations of the plurality of second-side metal bumpson the semiconductor substrate.
 6. The packaged substrate of claim 1,the plurality of first-side metal bumps and the plurality of second-sidemetal bumps are solder bumps or copper posts.
 7. The packaged substrateof claim 6, wherein there is a first under bump metallurgy (UBM) layerunder the plurality of first-side metal bumps and a second UBM layerunder the plurality second-side metal bumps.
 8. The packaged substrateof claim 1, further comprising a casing between the semiconductorsubstrate and the heat sink, wherein the casing comprises: a fluid inletconfigured to introduce a cooling fluid into the casing; and a fluidoutlet configured to allow the cooling fluid to exit the casing.
 9. Apackaged three-dimensional integrated circuit (3DIC) with a heat sink,comprising: a packaging substrate; a heat sink; a 3DIC, wherein the 3DICincludes at least two levels of integrated circuits (ICs), and whereinthe 3DIC has a plurality of first-side metal bumps on a first side ofthe 3DIC physically connected to the packaging substrate, and whereinthe 3DIC has a plurality of second-side metal bumps on a second side ofthe 3DIC physically connected to the heat sink, and wherein the firstside and the second side of the 3DIC are on opposite sides of thesubstrate, and a number of second-side metal bumps of the plurality ofsecond-side metal bumps per unit area of the second side is lower at acenter of the 3DIC than at a peripheral location of the 3DIC; and acasing between the 3DIC and the heat sink, wherein the casing comprises:a fluid inlet configured to introduce a cooling fluid into the casing;and a fluid outlet configured to allow the cooling fluid to exit thecasing.
 10. The packaged 3DIC of claim 9, wherein the 3DIC has throughsilicon vias.
 11. The packaged 3DIC of claim 9, wherein the packagingsubstrate has a ball-grid-array (BGA) on one side and is physicallyconnected to the 3DIC through metal bumps on the opposite side from theBGA, wherein locations of the metal bumps on the packaging substratecorrelate to locations of the plurality of first-side metal bumps on the3DIC.
 12. The packaged substrate of claim 9, wherein there are metalbumps on the heat sink on an opposite side of the plurality of pins,fins, or ridges on the heat sink, wherein locations of the metal bumpson the heat sink correlate to locations of the plurality of second-sidemetal bumps on the 3DIC.
 13. The packaged substrate of claim 9, whereinthe locations and number of the plurality of the second-side metal bumpsdepend on the heat generation pattern on the 3DIC.
 14. A packagedsubstrate with a heat sink, comprising: a packaging substrate; a heatsink; a semiconductor substrate, wherein the semiconductor substrate hasa plurality of first-side metal bumps on a first side of the substratephysically connected to the packaging substrate, and wherein thesemiconductor substrate has a conductive material attached to the heatsink on a second side of the substrate, and wherein the first side andthe second side of the semiconductor substrate are on opposite sides ofthe semiconductor substrate; and a casing between the semiconductorsubstrate and the heat sink, wherein the casing comprises: a fluid inletconfigured to introduce a cooling fluid into the casing; and a fluidoutlet configured to allow the cooling fluid to exit the casing.
 15. Thepackaged substrate of claim 14, wherein the conductive materialcomprises a thermal grease.
 16. The packaged substrate of claim 14,wherein the conductive material comprises a plurality of bumps.
 17. Thepackaged substrate of claim 14, wherein the cooling fluid is a gas. 18.The packaged substrate of claim 16, wherein each bump of the pluralityof bumps comprises: a copper layer over the semiconductor substrate; ametal layer over the copper layer; and a solder layer over the metallayer.
 19. The packaged substrate of claim 18, wherein the metal layercomprises nickel and the solder layer comprises a lead-free solder. 20.The packaged substrate of claim 14, wherein the cooling fluid is aliquid.